Turbo Molecular Pump Teardown

21 12 2010

All photos.

Yesterday I did a tear down of an old unused turbo molecular pump I’ve had laying around. Very instructive to see the insides. Here it is to begin with:

To assist disassembly, the pump has pry screws to push off the top case (Stuart’s tip):

Once you remove the outer shell you see this:

Sliding out the stators allows the removal of each pancake.

The rotor appears to be in perfect condition. It is machined from a single solid piece of metal. The stators are flimsy and largely bent out of shape.

At this point we still haven’t figured out how to remove the main rotor.



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