Cleaning a Vacuum Chamber

29 03 2009

Found some information on cleaning vacuum chambers in this presentation on ultra high vacuum.

Some methods:

  • Bead Blasting    
  • Ultrasonic
  • Glow Discharge (top right)
  • Electropolishing
  • Reactive Gas Clean
  • Chemical (Acid and Alkaline)
  • Rough Abrasives

Cleaning method for 300 series stainless (Brookhaven National Laboratory)

  1. Degrease with ultrasonic agitation
  2. Hot alkaline pH 11
  3. wash with air agitation
  4. Rinse cold tap water
  5. Rinse DI water with air agitation
  6. Dry in hot air oven
  7. Vacuum bake at 950 C for 2h
  8. Glow discharge clean
  9. Reactive gas clean
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