Found some information on cleaning vacuum chambers in this presentation on ultra high vacuum.
Some methods:
- Bead Blasting
- Ultrasonic
- Glow Discharge (top right)
- Electropolishing
- Reactive Gas Clean
- Chemical (Acid and Alkaline)
- Rough Abrasives
Cleaning method for 300 series stainless (Brookhaven National Laboratory)
- Degrease with ultrasonic agitation
- Hot alkaline pH 11
- wash with air agitation
- Rinse cold tap water
- Rinse DI water with air agitation
- Dry in hot air oven
- Vacuum bake at 950 C for 2h
- Glow discharge clean
- Reactive gas clean
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